UV-LED Mask Aligner (PLX)
The idonus UV-LED Mask Aligner (PLX) is a modular photolithography system combining high-precision mask alignment with high-intensity UV-LED exposure. Designed to accommodate a wide range of substrate sizes, up to 600 × 600 mm, it offers a flexible solution for demanding photolithography applications. Built around a high-power, highly collimated UV-LED light source, the PLX integrates the Modular Alignment Stage (MAS) with a Double Image Microscope (DIM) to ensure precise and reliable alignment. To meet different process requirements and levels of automation, the PLX is available in manual, semi-automatic, and fully automatic configurations.
The high-resolution optical alignment system provides a resolution below 1 µm and an alignment precision below 1 µm. The integrated UV-LED exposure system delivers an irradiance of up to 100 mW/cm².
Key parameters
- Substrate size: up to 600 × 600 mm
- Frontside and backside alignment
- Resolution: < 1 µm
- Alignment precision: < 1 µm
- UV-LED exposure
- Irradiance: up to 100 mW/cm²
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