The engineers at idonus have a strong expertise in the fields of mechanics, MEMS industry, LED-based design,
nonimaging opticsand machine vision. Our team is eager to help you develop custom solutions according
to your needs and requirements.
Here are some examples of developments we can propose:
For more information please refer to the Products section.
- Alignment systems
- MEMS fabrication equipment
- Wafer inspection
- Machine vision
- Optical measurement
- UV light sources
Most of our mandates are subject to confidentiality clauses.
Therefore, we only present hereafter internal projects or customized products.
1. Example of an engineering development: Customized high speed and high vacuum compatible XY table.
Detail of a vacuum compatible XY stage
Check our YouTube channel to of this system in action.
watch a video
2. Example of a customized VPE product: VPE100 vapor phase etcher
with a viewport (resistant to HF vapor).
Customized VPE100. The system includes a viewport that is resistant to HF vapor.
3. Example of a customized UV-EXP product: UV-EXP150R exposure system
with a customized Light Engine (slidable LED module with three high-power LEDs).
Detail of the Light Engine of an UV-EXP150R exposure system with (i) three selectable LED wavelengths (365 nm / 405 nm / 435 nm), and (ii) liquid cooling.
4. Linear XY stage with a large aperture for bottom side alignment.
This linear XY stage can be found in the PLX photolithography equipment. The bottom picture shows the stage in the wafer loading position.